High speed bright copper electroplating solution - semiconductor grade

Cat. No.: H475915

GRADE & PURITY Semiconductor grade

Synonyms

Fast Copper Electroplating Solution

Storage

Room temperature

Shipped In

Normal

概要

High speed bright copper electroplating solution is an electrolytic acid copper process engineered for plating copper bumps, pads, patterns and redistribution layers as well as filling vials and trenches on wide varieties of substrates including semiconductors, glass, polymers et al. This copper electroplating solution is made up of cupric sulphate and sulphuric acid with small additions of hydrochloric acid and organic additives. The organic additives have a wide concentration process window eliminating the need for separate additive solutions and replenishment for about 120 Amp-hours of electroplating.

Features and Benefits
· The use of single electroplating solution containing plating additives.
· Stable additives with large process window.
· High purity electrolyte and long shelf life.
· High cloud point (>80 °C) and low foaming.
· Low surface tension plating bath (∼44 dyne/cm @ 25 °C).
· High speed plating (Up to 5 μm/min).
· Uniform and flat bumps, pads, patterns and redistributions layers.
· Void free filling of vials and trenches.

Quality
Deposits characteristics:
· Density of 8.9 g/cm3.
· Electrical resistivity of 1.7–1.8 μΩ cm.
· Stress <50 MPa.
· High in-film purity (<10 ppm for N, S, C, O, Cl).
· Low surface roughness, RMS <10 nm @ 1 μm thick Cu.
· Planarization of trenches (no recess in 1 μm wide x 0.5 μm deep trenches with 0.8 μm thick Cu).
· Strong (111) texture with small (220) and (200).
· Reflectivity >75%.
· Elongation of 19–32%. 

Specifications

同義語

Fast Copper Electroplating Solution

仕様と純度

semiconductor grade

保管条件

Room temperature

入荷

Normal

等級

半導体グレード

名前と識別子

• PH: <2.5

よくある質問

What documentation is provided?

Available product documentation, including Certificates of Analysis (COA), Safety Data Sheets (SDS), and specification sheets, is shown in the product document area. Document availability and access follow the current site policy.

What does semiconductor grade mean?

semiconductor grade indicates that the material has been processed and tested for semiconductor and electronics manufacturing. Specifications focus on the impurities that affect performance in that application — for example, metal content for electronics, particle size for batteries, refractive index for optics, or moisture content for moisture-sensitive processes.

How should this product be stored?

Store at room temperature.

How is this product shipped?

This product ships under standard ambient conditions. No temperature-controlled packaging is required.