CVD & ALD precursors for thin-film deposition and semiconductor research. Browse metal-organic and inorganic precursors (where available) with key identifiers and handling guidance to support deposition process development.
CVD & ALD Precursors
Browse by type, application, or key specifications such as purity, grade, packaging, and handling requirements.
197 products
Popular Products
- Iridium chlorideSolid crystalline ,Ir≥62.0%In Stock Item #: I123015View ProductPricing & Pack Sizes
Technical Identifiers
- IUPAC Name
- trichloroiridium
- SMILES
- Cl[Ir](Cl)Cl
- InChIKey
- DANYXEHCMQHDNX-UHFFFAOYSA-K
- InChI
- 1S/3ClH.Ir/h3*1H;/q;;;+3/p-3
- Synonyms
- DANYXEHCMQHDNX-UHFFFAOYSA-K | Iridium(III) chloride, anhydrous (99.95+%-Ir) | Trichloroiridium | UNII-20278OEG45 | DT...
- Bis[4,4,4-trifluoro-1-(2-thienyl-1,3-butanedionato]zinc TMEDA adductCAS: 873585-38-7 Formula: C₂₂H₂₄F₆N₂O₄S₂Zn Molecular Weight: 623.95Out of Stock Item #: B282552View ProductPricing & Pack Sizes
Technical Identifiers
- Zirconium(IV) t-butoxideCAS: 2081-12-1 Formula: C16H36O4Zr Molecular Weight: 383.68Liquid ≥97%Out of Stock Item #: Z282612View ProductPricing & Pack Sizes
Technical Identifiers
- IUPAC Name
- 2-methylpropan-2-ol;zirconium
- SMILES
- CC(C)(C)O.CC(C)(C)O.CC(C)(C)O.CC(C)(C)O.[Zr]
- InChIKey
- WRMYASGYMABHCC-UHFFFAOYSA-N
- InChI
- 1S/4C4H10O.Zr/c4*1-4(2,3)5;/h4*5H,1-3H3;
- Synonyms
- zirconium(iv) t-butoxide | SCHEMBL108395 | Zirconium(IV) tert-butoxide, packaged for use in deposition systems | MFCD...
- Beryllium acetylacetonateIn Stock Item #: B107855View ProductPricing & Pack Sizes
Technical Identifiers
- IUPAC Name
- beryllium;(Z)-4-oxopent-2-en-2-olate
- SMILES
- [Be+2].CC(=CC(=O)C)[O-].CC(=CC(=O)C)[O-]
- InChIKey
- BBKXDHBLPBKCFR-FDGPNNRMSA-L
- InChI
- 1S/2C5H8O2.Be/c2*1-4(6)3-5(2)7;/h2*3,6H,1-2H3;/q;;+2/p-2/b2*4-3-;
- Synonyms
- EINECS 233-513-5 | SCHEMBL163499 | UNII-Z9095ZTD3U | Bis(pentane-2,4-dionato-O,O')beryllium | Beryllium, bis(2,4-pent...
- Tin acetylacetonateCAS: 16009-86-2 EC Number: 240-142-2 PubChem CID: 16687400 Formula: C10H14O4Sn Molecular Weight: 316.93In Stock Item #: T141382View ProductPricing & Pack Sizes
Technical Identifiers
- Synonyms
- Sn(acac)2
- N,N''-Di-t-butyl-2,3-diamidobutanetin(II)≥98% 50-1150, contained in 50 ml Swagelok® cylinder(96-1070) for CVD/ALDOut of Stock Item #: N283561View ProductPricing & Pack Sizes
Technical Identifiers
- IUPAC Name
- 1,3-ditert-butyl-1,3,2λ2-diazastannepane
- SMILES
- CC(C)(C)N1CCCCN([Sn]1)C(C)(C)C
- InChIKey
- OPXWRBRVIBWLSN-UHFFFAOYSA-N
- InChI
- 1S/C12H26N2.Sn/c1-11(2,3)13-9-7-8-10-14-12(4,5)6;/h7-10H2,1-6H3;/q-2;+2
- Tetrakis(ethylmethylamino)hafnium<0.15% Zr TEMAH,72-7720, contained in 50 ml Swagelok® cylinder96-1070 for CVD/ALDOut of Stock Item #: T283559View ProductPricing & Pack Sizes
Technical Identifiers
- IUPAC Name
- ethyl(methyl)azanide;hafnium(4+)
- SMILES
- CC[N-]C.CC[N-]C.CC[N-]C.CC[N-]C.[Hf+4]
- InChIKey
- NPEOKFBCHNGLJD-UHFFFAOYSA-N
- InChI
- 1S/4C3H8N.Hf/c4*1-3-4-2;/h4*3H2,1-2H3;/q4*-1;+4
- Synonyms
- Tetrakis(ethylmethylamido)hafnium(IV), packaged for use in deposition systems | SCHEMBL237323 | Tetrakis(ethylmethyla...
- Thallium(I) hexafluoroacetylacetonateCAS: 15444-43-6 Molecular Weight: 411.43Out of Stock Item #: T167528View ProductPricing & Pack Sizes
Technical Identifiers
- Ytterbium(III) hexafluoroacetylacetonate dihydrateSolid ≥99.9% metals basisOut of Stock Item #: Y283040View ProductPricing & Pack Sizes
Technical Identifiers
- IUPAC Name
- 1,1,1,5,5,5-hexafluoro-4-hydroxypent-3-en-2-one;ytterbium;dihydrate
- SMILES
- C(=C(C(F)(F)F)O)C(=O)C(F)(F)F.C(=C(C(F)(F)F)O)C(=O)C(F)(F)F.O.O.[Yb]
- InChIKey
- MHHPBTBQHUHFDW-UHFFFAOYSA-N
- InChI
- 1S/2C5H2F6O2.2H2O.Yb/c2*6-4(7,8)2(12)1-3(13)5(9,10)11;;;/h2*1,12H;2*1H2;
- Synonyms
- Ytterbium Hexafluoropentanedionate dihydrate
- Bis(N,N-di-i-propylformamidinato)calcium(II) dimer,CAS: 1959584-78-1 Formula: C₂₈H₆0Ca₂N₈ Molecular Weight: 588.99PrimorTrace™ ? PrimorTrace™ — Aladdin's trace-metal-analysis line with ultra-low metal background. Use for ICP/AAS trace-metal work where contamination must be minimal. ≥99.99% metals basisOut of Stock Item #: B282351View ProductPricing & Pack Sizes
Technical Identifiers
- Dimethylbis(t-butylcyclopentadienyl)zirconiumCAS: 68193-40-8 Formula: C₂0H₃₂Zr Molecular Weight: 363.7Out of Stock Item #: D282602View ProductPricing & Pack Sizes
Technical Identifiers
- Niobium chlorideSolid ≥99.9% metals basisIn Stock Item #: N106720View ProductPricing & Pack Sizes
Technical Identifiers
- IUPAC Name
- pentachloroniobium
- SMILES
- Cl[Nb](Cl)(Cl)(Cl)Cl
- InChIKey
- YHBDIEWMOMLKOO-UHFFFAOYSA-I
- InChI
- 1S/5ClH.Nb/h5*1H;/q;;;;;+5/p-5
- Synonyms
- Niobium Pentachloride | Pentachloroniobium | Niobium(V) Chloride
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R&D Use Only Products supplied for research and development use
Frequently Asked Questions
How do I choose between CVD and ALD precursors?
CVD precursors require thermal stability across deposition temperature range and clean decomposition. ALD precursors need self-limiting surface reactivity, volatility at low temperatures, and orthogonal reactivity with the co-reactant.
What specifications matter most for thin film precursors?
Volatility (vapor pressure curve), thermal stability, reactivity with substrate or co-reactant, byproduct cleanliness, purity (typically ≥99.9% for semiconductor work), and metal contamination levels.
Are precursors available in semiconductor purity grades?
Yes. We offer research-grade precursors and can support semiconductor-grade specifications for select compounds. Contact us for specific purity, metal contamination, and packaging requirements.
How should air- or moisture-sensitive precursors be handled?
Most CVD and ALD precursors require strict inert atmosphere handling (glovebox or Schlenk line). Packaging options include septum-sealed bottles, double-needle transfer adapters, and stainless steel cylinders for production scale.