Tantalum nitride etchant

Cat. No.: T487601
AVAILABLE TO ORDER
Synonyms
Tantalum nitride etch
Storage
Room temperature
 ·  off list, applied to all prices below.
Size
Status
Price
Qty
500ml
T487601-500ml
8-12 wks(?) Production requires sourcing of materials. We appreciate your patience and understanding.

$370.90

$433.90
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Why this grade

for sensitive chromatographic and analytical workflows requiring minimal baseline interference.

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Storage & shipping

Room temperature Ships Check lot-specific COA for exact specifications.

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Quality documents

SDS, COA, datasheet, and spec sheet available for download. Lot-specific COA accessible via lot number lookup.

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Literature proof

Cited in 0 peer-reviewed publications across chromatography, organic synthesis, and cross-coupling reactions.

Overview

Description

Etchant solution for precise, clean etching of tantalum, tantalum nitride, and tantalum oxide thin films and resists in electronics applications


Preparation instructions

Etch times vary depending on material type (Ta, TaN, or Ta2O5) and purity.Dilute with water or lower the temperature to achieve a lower etch rate. Adding 1 part water to 2 parts etchant or reducing the temperature 10 °C will approximately reduce the etch rate by 50%.Parts to be etched should be placed in etchant solution with mild to moderate mechanical agitation.Tantalum Etchants contain hydrofluoric acid and will attack silicon oxides, titanium, nickel, aluminum, and chromium.Gold would be the ideal etch stop. You might also succeed with tungstenRinse with Deionized water.

Specifications

Synonyms
Tantalum nitride etch
Storage
Room temperature

Documentation

📋 Safety Data Sheet (SDS)

Comprehensive hazard, handling, storage, and regulatory compliance document.

Download SDS →

✅ Certificate of Analysis (COA)

Lot-specific quality data. Enter your lot number to retrieve the exact COA.

Look up COA →

📊 Datasheet

Quick-reference summary of product specifications and applications.

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🔬 Specification Sheet

Full quality attributes and acceptance criteria for this grade.

View spec sheet →

Advanced Data

Certificates(CoA,COO,BSE/TSE and Analysis Chart)
C of A & Other Certificates(BSE/TSE, COO):
Analytical Chart:
Documents & Articles
Solution Calculators
Reviews

Customer Reviews

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