Tris(dimethylamino)silane - packaged for use in deposition systems , CAS No.15112-89-7

CAS: 15112-89-7 Cat. No.: T432153 Molecular Weight: 161.32 EC Number: 239-165-0 PubChem CID: 6335325

GRADE & PURITY packaged for use in deposition systems

Synonyms

s20900 | TDMAS | EINECS 239-165-0 | SCHEMBL35636 | Silanetriamine, N,N,N',N',N'',N''-hexamethyl-;N,N,N',N',N'',N''-Hexamethylsilanetriamine | DTXSID00884786 | MFCD00048006 | BCP30199 | FT-0637184 | BRN 1901643 | [bis(dimethylamino)silyl]dimethylamine | Tr

Storage

Room temperature

Overview

Application

Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.

Specifications

Synonyms

s20900 | TDMAS | EINECS 239-165-0 | SCHEMBL35636 | Silanetriamine, N, N, N', N', N'', N''-hexamethyl-;N, N, N', N', N'', N''-Hexamethylsilanetriamine | DTXSID00884786 | MFCD00048006 | BCP30199 | FT-0637184 | BRN 1901643 | [bis(dimethylamino)silyl]dimethylamine | Tr

Specifications & Purity

packaged for use in deposition systems

Storage

Room temperature

Names and Identifiers

• Canonical Smiles: CN(C)[Si](N(C)C)N(C)C
• InChIKey: GIRKRMUMWJFNRI-UHFFFAOYSA-N
• INCHI: 1S/C6H18N3Si/c1-7(2)10(8(3)4)9(5)6/h1-6H3
• Isomeric SMILES: CN(C)[Si](N(C)C)N(C)C
• WGK Germany: 3
• RTECS: VV5800000
• PubChem CID: 6335325
• Molecular Weight: 161.32

Taxonomic Classification

Taxonomy Tree

• Kingdom Organic compounds
  • Superclass Organic salts
    • Class Organic metal salts
      • Subclass Organic metalloid salts

• Kingdom: Organic compounds
• Superclass: Organic salts
• Class: Organic metal salts
• Subclass: Organic metalloid salts
• Intermediate Tree Nodes: Not available
• Direct Parent: Organic metalloid salts
• Alternative Parents: Organonitrogen compounds Hydrocarbon derivatives
• Molecular Framework: Aliphatic acyclic compounds
• Substituents: Organic metalloid salt - Organic nitrogen compound - Hydrocarbon derivative - Organonitrogen compound - Aliphatic acyclic compound
• Description: This compound belongs to the class of organic compounds known as organic metalloid salts. These are organic salt compounds containing a metalloid atom in its ionic form.
• External Descriptors: Not available

Data sources

1. Djoumbou Feunang Y, Eisner R, Knox C, Chepelev L, Hastings J, Owen G, Fahy E, Steinbeck C, Subramanian S, Bolton E, Greiner R, and Wishart DS. ClassyFire: Automated Chemical Classification With A Comprehensive, Computable Taxonomy. Journal of Cheminformatics, 2016, 8:61.

DOI: 10.1186/s13321-016-0174-y

Chemical and Physical Properties

• Flash Point(°F): 17.6 - 32 °F
• Flash Point(°C): -8 - 0 °C
• Boil Point(°C): 142 °C
• Melt Point(°C): −90 °C
• Molecular Weight: 160.310 g/mol
• Hydrogen Bond Donor Count: 0
• Hydrogen Bond Acceptor Count: 3
• Rotatable Bond Count: 3
• Exact Mass: 160.127 Da
• Monoisotopic Mass: 160.127 Da
• Topological Polar Surface Area: 9.700 Ų
• Heavy Atom Count: 10
• Formal Charge: 0
• Complexity: 74.000
• Isotope Atom Count: 0
• Defined Atom Stereocenter Count: 0
• Undefined Atom Stereocenter Count: 0
• Defined Bond Stereocenter Count: 0
• Undefined Bond Stereocenter Count: 0
• The total count of all stereochemical bonds: 0
• Covalently-Bonded Unit Count: 1

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